May 31, 2012 , by
Public Summary Month 5/2012
For operating the robot and the peripherals a graphical user interface (GUI) has been implemented. The GUI offers functionalities for teaching robot poses, for commanding peripheral devices, and to save and load programs. Using the GUI a tool exchange procedure was programmed.
The motion resolution of the micromanipulator was analyzed using a 3-beam-interferometer. Subject to the analysis was the motion resolution in tool-direction (Z-direction). Steps of 10 nm could be resolved by the hardware.